8/12/2010	9:58:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2010	9:58:45 AM	Recipe started at 9:58 AM
8/12/2010	9:58:45 AM	H2 valve closed
8/12/2010	9:58:45 AM	BCl3 valve closed
8/12/2010	9:58:45 AM	PH3 valve closed
8/12/2010	9:58:45 AM	SiCl4 pre valve closed
8/12/2010	9:58:45 AM	SiCl4 post valve closed
8/12/2010	9:58:45 AM	Main Vac valve closed
8/12/2010	9:58:45 AM	Bypass valve closed
8/12/2010	9:58:45 AM	Bubbler valve closed
8/12/2010	9:58:45 AM	Helium valve opened
8/12/2010	9:58:45 AM	Helium MFC set to  500.000000
8/12/2010	9:58:45 AM	H2 MFC set to  0.000000
8/12/2010	9:58:45 AM	BCl3 MFC set to  0.000000
8/12/2010	9:58:45 AM	PHl3 MFC set to  0.000000
8/12/2010	9:58:45 AM	SiCl4 MFC set to  0.000000
8/12/2010	9:58:45 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	9:58:45 AM	Tube furnace set to 0
8/12/2010	10:00:06 AM	Helium valve closed
8/12/2010	10:00:06 AM	H2 valve closed
8/12/2010	10:00:06 AM	BCl3 valve closed
8/12/2010	10:00:06 AM	PH3 valve closed
8/12/2010	10:00:06 AM	SiCl4 pre valve closed
8/12/2010	10:00:06 AM	SiCl4 post valve closed
8/12/2010	10:00:06 AM	Main Vac valve closed
8/12/2010	10:00:06 AM	Bypass valve closed
8/12/2010	10:00:06 AM	Bubbler valve closed
8/12/2010	10:00:06 AM	Helium MFC set to  0.000000
8/12/2010	10:00:06 AM	H2 MFC set to  0.000000
8/12/2010	10:00:06 AM	BCl3 MFC set to  0.000000
8/12/2010	10:00:06 AM	PHl3 MFC set to  0.000000
8/12/2010	10:00:06 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:00:06 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:00:06 AM	Tube furnace set to 0
8/12/2010	10:00:06 AM	Run finished at 10:00 AM
8/12/2010	10:00:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2010	10:08:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	10:08:51 AM	Recipe started at 10:08 AM
8/12/2010	10:08:51 AM	Helium valve closed
8/12/2010	10:08:51 AM	H2 valve closed
8/12/2010	10:08:51 AM	BCl3 valve closed
8/12/2010	10:08:51 AM	PH3 valve closed
8/12/2010	10:08:51 AM	SiCl4 pre valve closed
8/12/2010	10:08:51 AM	SiCl4 post valve closed
8/12/2010	10:08:51 AM	Main Vac valve closed
8/12/2010	10:08:51 AM	Bubbler valve closed
8/12/2010	10:08:51 AM	Bypass valve opened
8/12/2010	10:08:51 AM	Helium MFC set to  0.000000
8/12/2010	10:08:51 AM	H2 MFC set to  0.000000
8/12/2010	10:08:51 AM	BCl3 MFC set to  0.000000
8/12/2010	10:08:51 AM	PHl3 MFC set to  0.000000
8/12/2010	10:08:51 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:08:51 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:08:51 AM	Tube furnace set to 0
8/12/2010	10:09:29 AM	Helium valve closed
8/12/2010	10:09:29 AM	H2 valve closed
8/12/2010	10:09:29 AM	BCl3 valve closed
8/12/2010	10:09:29 AM	PH3 valve closed
8/12/2010	10:09:29 AM	SiCl4 pre valve closed
8/12/2010	10:09:29 AM	SiCl4 post valve closed
8/12/2010	10:09:29 AM	Bubbler valve closed
8/12/2010	10:09:29 AM	Main Vac valve opened
8/12/2010	10:09:29 AM	Bypass valve opened
8/12/2010	10:09:29 AM	Helium MFC set to  0.000000
8/12/2010	10:09:29 AM	H2 MFC set to  0.000000
8/12/2010	10:09:29 AM	BCl3 MFC set to  0.000000
8/12/2010	10:09:29 AM	PHl3 MFC set to  0.000000
8/12/2010	10:09:29 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:09:29 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:09:29 AM	Tube furnace set to 0
8/12/2010	10:09:30 AM	Run finished at 10:09 AM
8/12/2010	10:09:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	10:10:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2010	10:10:09 AM	Recipe started at 10:10 AM
8/12/2010	10:10:09 AM	H2 valve closed
8/12/2010	10:10:09 AM	BCl3 valve closed
8/12/2010	10:10:09 AM	PH3 valve closed
8/12/2010	10:10:09 AM	SiCl4 pre valve closed
8/12/2010	10:10:09 AM	SiCl4 post valve closed
8/12/2010	10:10:09 AM	Main Vac valve closed
8/12/2010	10:10:09 AM	Bypass valve closed
8/12/2010	10:10:09 AM	Bubbler valve closed
8/12/2010	10:10:09 AM	Helium valve opened
8/12/2010	10:10:09 AM	Helium MFC set to  500.000000
8/12/2010	10:10:09 AM	H2 MFC set to  0.000000
8/12/2010	10:10:09 AM	BCl3 MFC set to  0.000000
8/12/2010	10:10:09 AM	PHl3 MFC set to  0.000000
8/12/2010	10:10:10 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:10:10 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:10:10 AM	Tube furnace set to 0
8/12/2010	10:10:54 AM	Helium valve closed
8/12/2010	10:10:54 AM	H2 valve closed
8/12/2010	10:10:54 AM	BCl3 valve closed
8/12/2010	10:10:54 AM	PH3 valve closed
8/12/2010	10:10:54 AM	SiCl4 pre valve closed
8/12/2010	10:10:54 AM	SiCl4 post valve closed
8/12/2010	10:10:54 AM	Main Vac valve closed
8/12/2010	10:10:54 AM	Bypass valve closed
8/12/2010	10:10:54 AM	Bubbler valve closed
8/12/2010	10:10:54 AM	Helium MFC set to  0.000000
8/12/2010	10:10:54 AM	H2 MFC set to  0.000000
8/12/2010	10:10:54 AM	BCl3 MFC set to  0.000000
8/12/2010	10:10:54 AM	PHl3 MFC set to  0.000000
8/12/2010	10:10:54 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:10:54 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:10:54 AM	Tube furnace set to 0
8/12/2010	10:10:55 AM	Run finished at 10:10 AM
8/12/2010	10:10:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2010	10:10:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	10:10:57 AM	Recipe started at 10:10 AM
8/12/2010	10:10:57 AM	Helium valve closed
8/12/2010	10:10:57 AM	H2 valve closed
8/12/2010	10:10:57 AM	BCl3 valve closed
8/12/2010	10:10:57 AM	PH3 valve closed
8/12/2010	10:10:57 AM	SiCl4 pre valve closed
8/12/2010	10:10:57 AM	SiCl4 post valve closed
8/12/2010	10:10:57 AM	Main Vac valve closed
8/12/2010	10:10:57 AM	Bubbler valve closed
8/12/2010	10:10:57 AM	Bypass valve opened
8/12/2010	10:10:57 AM	Helium MFC set to  0.000000
8/12/2010	10:10:57 AM	H2 MFC set to  0.000000
8/12/2010	10:10:57 AM	BCl3 MFC set to  0.000000
8/12/2010	10:10:57 AM	PHl3 MFC set to  0.000000
8/12/2010	10:10:57 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:10:57 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:10:57 AM	Tube furnace set to 0
8/12/2010	10:11:21 AM	Helium valve closed
8/12/2010	10:11:21 AM	H2 valve closed
8/12/2010	10:11:21 AM	BCl3 valve closed
8/12/2010	10:11:21 AM	PH3 valve closed
8/12/2010	10:11:21 AM	SiCl4 pre valve closed
8/12/2010	10:11:21 AM	SiCl4 post valve closed
8/12/2010	10:11:21 AM	Bubbler valve closed
8/12/2010	10:11:21 AM	Main Vac valve opened
8/12/2010	10:11:21 AM	Bypass valve opened
8/12/2010	10:11:21 AM	Helium MFC set to  0.000000
8/12/2010	10:11:21 AM	H2 MFC set to  0.000000
8/12/2010	10:11:21 AM	BCl3 MFC set to  0.000000
8/12/2010	10:11:21 AM	PHl3 MFC set to  0.000000
8/12/2010	10:11:21 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:11:21 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:11:21 AM	Tube furnace set to 0
8/12/2010	10:11:21 AM	Run finished at 10:11 AM
8/12/2010	10:11:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	10:13:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2010	10:13:47 AM	Recipe started at 10:13 AM
8/12/2010	10:13:47 AM	H2 valve closed
8/12/2010	10:13:47 AM	BCl3 valve closed
8/12/2010	10:13:47 AM	PH3 valve closed
8/12/2010	10:13:47 AM	SiCl4 pre valve closed
8/12/2010	10:13:47 AM	SiCl4 post valve closed
8/12/2010	10:13:47 AM	Main Vac valve closed
8/12/2010	10:13:47 AM	Bypass valve closed
8/12/2010	10:13:47 AM	Bubbler valve closed
8/12/2010	10:13:47 AM	Helium valve opened
8/12/2010	10:13:47 AM	Helium MFC set to  500.000000
8/12/2010	10:13:47 AM	H2 MFC set to  0.000000
8/12/2010	10:13:47 AM	BCl3 MFC set to  0.000000
8/12/2010	10:13:47 AM	PHl3 MFC set to  0.000000
8/12/2010	10:13:47 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:13:47 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:13:47 AM	Tube furnace set to 0
8/12/2010	10:15:07 AM	Helium valve closed
8/12/2010	10:15:07 AM	H2 valve closed
8/12/2010	10:15:07 AM	BCl3 valve closed
8/12/2010	10:15:07 AM	PH3 valve closed
8/12/2010	10:15:07 AM	SiCl4 pre valve closed
8/12/2010	10:15:07 AM	SiCl4 post valve closed
8/12/2010	10:15:07 AM	Main Vac valve closed
8/12/2010	10:15:07 AM	Bypass valve closed
8/12/2010	10:15:07 AM	Bubbler valve closed
8/12/2010	10:15:07 AM	Helium MFC set to  0.000000
8/12/2010	10:15:07 AM	H2 MFC set to  0.000000
8/12/2010	10:15:07 AM	BCl3 MFC set to  0.000000
8/12/2010	10:15:07 AM	PHl3 MFC set to  0.000000
8/12/2010	10:15:07 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:15:07 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:15:07 AM	Tube furnace set to 0
8/12/2010	10:15:08 AM	Run finished at 10:15 AM
8/12/2010	10:15:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2010	10:18:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	10:18:25 AM	Recipe started at 10:18 AM
8/12/2010	10:18:25 AM	Helium valve closed
8/12/2010	10:18:25 AM	H2 valve closed
8/12/2010	10:18:25 AM	BCl3 valve closed
8/12/2010	10:18:25 AM	PH3 valve closed
8/12/2010	10:18:25 AM	SiCl4 pre valve closed
8/12/2010	10:18:25 AM	SiCl4 post valve closed
8/12/2010	10:18:25 AM	Main Vac valve closed
8/12/2010	10:18:25 AM	Bubbler valve closed
8/12/2010	10:18:25 AM	Bypass valve opened
8/12/2010	10:18:25 AM	Helium MFC set to  0.000000
8/12/2010	10:18:25 AM	H2 MFC set to  0.000000
8/12/2010	10:18:25 AM	BCl3 MFC set to  0.000000
8/12/2010	10:18:25 AM	PHl3 MFC set to  0.000000
8/12/2010	10:18:25 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:18:25 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:18:26 AM	Tube furnace set to 0
8/12/2010	10:19:04 AM	Helium valve closed
8/12/2010	10:19:04 AM	H2 valve closed
8/12/2010	10:19:04 AM	BCl3 valve closed
8/12/2010	10:19:04 AM	PH3 valve closed
8/12/2010	10:19:04 AM	SiCl4 pre valve closed
8/12/2010	10:19:04 AM	SiCl4 post valve closed
8/12/2010	10:19:04 AM	Bubbler valve closed
8/12/2010	10:19:04 AM	Main Vac valve opened
8/12/2010	10:19:04 AM	Bypass valve opened
8/12/2010	10:19:04 AM	Helium MFC set to  0.000000
8/12/2010	10:19:04 AM	H2 MFC set to  0.000000
8/12/2010	10:19:04 AM	BCl3 MFC set to  0.000000
8/12/2010	10:19:04 AM	PHl3 MFC set to  0.000000
8/12/2010	10:19:04 AM	SiCl4 MFC set to  0.000000
8/12/2010	10:19:04 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:19:04 AM	Tube furnace set to 0
8/12/2010	10:19:04 AM	Run finished at 10:19 AM
8/12/2010	10:19:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	10:31:04 AM	Helium MFC set to  50.000000
8/12/2010	10:31:04 AM	Helium valve opened
8/12/2010	10:47:49 AM	Helium valve closed
8/12/2010	10:49:53 AM	Helium MFC set to  75.000000
8/12/2010	10:49:54 AM	Helium valve opened
8/12/2010	11:26:11 AM	Helium valve closed
8/12/2010	11:32:51 AM	Helium valve opened
8/12/2010	11:36:19 AM	Helium valve closed
8/12/2010	11:38:37 AM	Recipe started at 11:38 AM
8/12/2010	11:38:37 AM	Helium valve closed
8/12/2010	11:38:37 AM	BCl3 valve closed
8/12/2010	11:38:37 AM	PH3 valve closed
8/12/2010	11:38:37 AM	SiCl4 pre valve closed
8/12/2010	11:38:37 AM	SiCl4 post valve closed
8/12/2010	11:38:37 AM	Main Vac valve closed
8/12/2010	11:38:37 AM	Bypass valve closed
8/12/2010	11:38:37 AM	Bubbler valve closed
8/12/2010	11:38:37 AM	H2 valve opened
8/12/2010	11:38:37 AM	Helium MFC set to  0.000000
8/12/2010	11:38:37 AM	H2 MFC set to  500.000000
8/12/2010	11:38:37 AM	BCl3 MFC set to  0.000000
8/12/2010	11:38:37 AM	PHl3 MFC set to  0.000000
8/12/2010	11:38:37 AM	SiCl4 MFC set to  0.000000
8/12/2010	11:38:37 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	11:38:38 AM	Tube furnace set to 0
8/12/2010	11:40:01 AM	Helium valve closed
8/12/2010	11:40:01 AM	BCl3 valve closed
8/12/2010	11:40:01 AM	PH3 valve closed
8/12/2010	11:40:01 AM	SiCl4 pre valve closed
8/12/2010	11:40:01 AM	SiCl4 post valve closed
8/12/2010	11:40:01 AM	Main Vac valve closed
8/12/2010	11:40:01 AM	Bypass valve closed
8/12/2010	11:40:01 AM	H2 valve opened
8/12/2010	11:40:01 AM	Bubbler valve opened
8/12/2010	11:40:01 AM	Helium MFC set to  0.000000
8/12/2010	11:40:01 AM	H2 MFC set to  500.000000
8/12/2010	11:40:01 AM	BCl3 MFC set to  0.000000
8/12/2010	11:40:01 AM	PHl3 MFC set to  0.000000
8/12/2010	11:40:01 AM	SiCl4 MFC set to  0.000000
8/12/2010	11:40:01 AM	Bypass solenoid MFC set to  0.000000
8/12/2010	11:40:01 AM	Tube furnace set to 1000
8/12/2010	12:00:01 PM	Helium valve closed
8/12/2010	12:00:01 PM	BCl3 valve closed
8/12/2010	12:00:01 PM	PH3 valve closed
8/12/2010	12:00:01 PM	Main Vac valve closed
8/12/2010	12:00:01 PM	Bypass valve closed
8/12/2010	12:00:01 PM	H2 valve opened
8/12/2010	12:00:01 PM	SiCl4 pre valve opened
8/12/2010	12:00:01 PM	SiCl4 post valve opened
8/12/2010	12:00:01 PM	Bubbler valve opened
8/12/2010	12:00:01 PM	Helium MFC set to  0.000000
8/12/2010	12:00:01 PM	H2 MFC set to  500.000000
8/12/2010	12:00:01 PM	BCl3 MFC set to  0.000000
8/12/2010	12:00:01 PM	PHl3 MFC set to  0.000000
8/12/2010	12:00:01 PM	SiCl4 MFC set to  50.000000
8/12/2010	12:00:01 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	12:00:02 PM	Tube furnace set to 1000
8/12/2010	12:20:02 PM	H2 valve closed
8/12/2010	12:20:02 PM	BCl3 valve closed
8/12/2010	12:20:02 PM	PH3 valve closed
8/12/2010	12:20:02 PM	SiCl4 pre valve closed
8/12/2010	12:20:02 PM	SiCl4 post valve closed
8/12/2010	12:20:02 PM	Main Vac valve closed
8/12/2010	12:20:02 PM	Bypass valve closed
8/12/2010	12:20:02 PM	Helium valve opened
8/12/2010	12:20:02 PM	Bubbler valve opened
8/12/2010	12:20:02 PM	Helium MFC set to  500.000000
8/12/2010	12:20:02 PM	H2 MFC set to  0.000000
8/12/2010	12:20:02 PM	BCl3 MFC set to  0.000000
8/12/2010	12:20:02 PM	PHl3 MFC set to  0.000000
8/12/2010	12:20:02 PM	SiCl4 MFC set to  0.000000
8/12/2010	12:20:02 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	12:20:02 PM	Tube furnace set to 0
8/12/2010	12:52:22 PM	Run aborted at 12:52 PM
8/12/2010	12:52:22 PM	Helium valve closed
8/12/2010	12:52:22 PM	H2 valve closed
8/12/2010	12:52:22 PM	BCl3 valve closed
8/12/2010	12:52:22 PM	PH3 valve closed
8/12/2010	12:52:22 PM	SiCl4 pre valve closed
8/12/2010	12:52:22 PM	SiCl4 post valve closed
8/12/2010	12:52:22 PM	Bypass valve closed
8/12/2010	12:52:22 PM	Main Vac valve closed
8/12/2010	12:52:22 PM	Bubbler valve closed
8/12/2010	12:52:22 PM	Helium MFC set to  0.000000
8/12/2010	12:52:22 PM	H2 MFC set to  0.000000
8/12/2010	12:52:22 PM	BCl3 MFC set to  0.000000
8/12/2010	12:52:22 PM	PHl3 MFC set to  0.000000
8/12/2010	12:52:22 PM	SiCl4 MFC set to  0.000000
8/12/2010	12:52:22 PM	Tube furnace set to 0
8/12/2010	12:58:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	12:58:08 PM	Recipe started at 12:58 PM
8/12/2010	12:58:08 PM	Helium valve closed
8/12/2010	12:58:08 PM	H2 valve closed
8/12/2010	12:58:08 PM	BCl3 valve closed
8/12/2010	12:58:08 PM	PH3 valve closed
8/12/2010	12:58:08 PM	SiCl4 pre valve closed
8/12/2010	12:58:08 PM	SiCl4 post valve closed
8/12/2010	12:58:08 PM	Main Vac valve closed
8/12/2010	12:58:08 PM	Bubbler valve closed
8/12/2010	12:58:08 PM	Bypass valve opened
8/12/2010	12:58:08 PM	Helium MFC set to  0.000000
8/12/2010	12:58:08 PM	H2 MFC set to  0.000000
8/12/2010	12:58:08 PM	BCl3 MFC set to  0.000000
8/12/2010	12:58:08 PM	PHl3 MFC set to  0.000000
8/12/2010	12:58:08 PM	SiCl4 MFC set to  0.000000
8/12/2010	12:58:08 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	12:58:08 PM	Tube furnace set to 0
8/12/2010	12:58:47 PM	Helium valve closed
8/12/2010	12:58:47 PM	H2 valve closed
8/12/2010	12:58:47 PM	BCl3 valve closed
8/12/2010	12:58:48 PM	PH3 valve closed
8/12/2010	12:58:48 PM	SiCl4 pre valve closed
8/12/2010	12:58:48 PM	SiCl4 post valve closed
8/12/2010	12:58:48 PM	Bubbler valve closed
8/12/2010	12:58:48 PM	Main Vac valve opened
8/12/2010	12:58:48 PM	Bypass valve opened
8/12/2010	12:58:48 PM	Helium MFC set to  0.000000
8/12/2010	12:58:48 PM	H2 MFC set to  0.000000
8/12/2010	12:58:48 PM	BCl3 MFC set to  0.000000
8/12/2010	12:58:48 PM	PHl3 MFC set to  0.000000
8/12/2010	12:58:48 PM	SiCl4 MFC set to  0.000000
8/12/2010	12:58:48 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	12:58:48 PM	Tube furnace set to 0
8/12/2010	12:58:48 PM	Run finished at 12:58 PM
8/12/2010	12:58:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	12:58:53 PM	Helium MFC set to  75.000000
8/12/2010	12:58:54 PM	Helium valve opened
8/12/2010	1:32:25 PM	Helium valve closed
8/12/2010	1:34:25 PM	Helium valve opened
8/12/2010	1:34:25 PM	Helium valve closed
8/12/2010	1:34:26 PM	Helium valve opened
8/12/2010	1:47:46 PM	Helium valve closed
8/12/2010	1:48:34 PM	Recipe started at 1:48 PM
8/12/2010	1:48:34 PM	Helium valve closed
8/12/2010	1:48:34 PM	BCl3 valve closed
8/12/2010	1:48:34 PM	PH3 valve closed
8/12/2010	1:48:34 PM	SiCl4 pre valve closed
8/12/2010	1:48:34 PM	SiCl4 post valve closed
8/12/2010	1:48:34 PM	Main Vac valve closed
8/12/2010	1:48:34 PM	Bypass valve closed
8/12/2010	1:48:34 PM	Bubbler valve closed
8/12/2010	1:48:34 PM	H2 valve opened
8/12/2010	1:48:34 PM	Helium MFC set to  0.000000
8/12/2010	1:48:34 PM	H2 MFC set to  500.000000
8/12/2010	1:48:34 PM	BCl3 MFC set to  0.000000
8/12/2010	1:48:34 PM	PHl3 MFC set to  0.000000
8/12/2010	1:48:34 PM	SiCl4 MFC set to  0.000000
8/12/2010	1:48:34 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	1:48:34 PM	Tube furnace set to 0
8/12/2010	1:49:57 PM	Helium valve closed
8/12/2010	1:49:57 PM	BCl3 valve closed
8/12/2010	1:49:57 PM	PH3 valve closed
8/12/2010	1:49:57 PM	SiCl4 pre valve closed
8/12/2010	1:49:57 PM	SiCl4 post valve closed
8/12/2010	1:49:57 PM	Main Vac valve closed
8/12/2010	1:49:57 PM	Bypass valve closed
8/12/2010	1:49:57 PM	H2 valve opened
8/12/2010	1:49:57 PM	Bubbler valve opened
8/12/2010	1:49:57 PM	Helium MFC set to  0.000000
8/12/2010	1:49:57 PM	H2 MFC set to  500.000000
8/12/2010	1:49:57 PM	BCl3 MFC set to  0.000000
8/12/2010	1:49:57 PM	PHl3 MFC set to  0.000000
8/12/2010	1:49:57 PM	SiCl4 MFC set to  0.000000
8/12/2010	1:49:57 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	1:49:57 PM	Tube furnace set to 1000
8/12/2010	2:09:57 PM	Helium valve closed
8/12/2010	2:09:57 PM	BCl3 valve closed
8/12/2010	2:09:57 PM	PH3 valve closed
8/12/2010	2:09:57 PM	Main Vac valve closed
8/12/2010	2:09:57 PM	Bypass valve closed
8/12/2010	2:09:57 PM	H2 valve opened
8/12/2010	2:09:57 PM	SiCl4 pre valve opened
8/12/2010	2:09:57 PM	SiCl4 post valve opened
8/12/2010	2:09:57 PM	Bubbler valve opened
8/12/2010	2:09:57 PM	Helium MFC set to  0.000000
8/12/2010	2:09:57 PM	H2 MFC set to  500.000000
8/12/2010	2:09:57 PM	BCl3 MFC set to  0.000000
8/12/2010	2:09:57 PM	PHl3 MFC set to  0.000000
8/12/2010	2:09:57 PM	SiCl4 MFC set to  50.000000
8/12/2010	2:09:57 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	2:09:57 PM	Tube furnace set to 1000
8/12/2010	2:21:57 PM	BCl3 valve closed
8/12/2010	2:21:57 PM	PH3 valve closed
8/12/2010	2:21:57 PM	SiCl4 pre valve closed
8/12/2010	2:21:57 PM	SiCl4 post valve closed
8/12/2010	2:21:57 PM	Main Vac valve closed
8/12/2010	2:21:57 PM	Bypass valve closed
8/12/2010	2:21:57 PM	Helium valve opened
8/12/2010	2:21:57 PM	H2 valve opened
8/12/2010	2:21:57 PM	Bubbler valve opened
8/12/2010	2:21:57 PM	Helium MFC set to  250.000000
8/12/2010	2:21:57 PM	H2 MFC set to  250.000000
8/12/2010	2:21:57 PM	BCl3 MFC set to  0.000000
8/12/2010	2:21:57 PM	PHl3 MFC set to  0.000000
8/12/2010	2:21:57 PM	SiCl4 MFC set to  0.000000
8/12/2010	2:21:57 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	2:21:57 PM	Tube furnace set to 0
8/12/2010	2:55:17 PM	Helium valve closed
8/12/2010	2:55:17 PM	H2 valve closed
8/12/2010	2:55:17 PM	BCl3 valve closed
8/12/2010	2:55:17 PM	PH3 valve closed
8/12/2010	2:55:17 PM	SiCl4 pre valve closed
8/12/2010	2:55:17 PM	SiCl4 post valve closed
8/12/2010	2:55:17 PM	Main Vac valve closed
8/12/2010	2:55:17 PM	Bypass valve closed
8/12/2010	2:55:17 PM	Bubbler valve closed
8/12/2010	2:55:17 PM	Helium MFC set to  0.000000
8/12/2010	2:55:17 PM	H2 MFC set to  0.000000
8/12/2010	2:55:17 PM	BCl3 MFC set to  0.000000
8/12/2010	2:55:17 PM	PHl3 MFC set to  0.000000
8/12/2010	2:55:17 PM	SiCl4 MFC set to  0.000000
8/12/2010	2:55:17 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	2:55:18 PM	Tube furnace set to 0
8/12/2010	2:55:18 PM	Run finished at 2:55 PM
8/12/2010	3:07:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	3:07:52 PM	Recipe started at 3:07 PM
8/12/2010	3:07:52 PM	Helium valve closed
8/12/2010	3:07:52 PM	H2 valve closed
8/12/2010	3:07:52 PM	BCl3 valve closed
8/12/2010	3:07:52 PM	PH3 valve closed
8/12/2010	3:07:52 PM	SiCl4 pre valve closed
8/12/2010	3:07:52 PM	SiCl4 post valve closed
8/12/2010	3:07:52 PM	Main Vac valve closed
8/12/2010	3:07:52 PM	Bubbler valve closed
8/12/2010	3:07:52 PM	Bypass valve opened
8/12/2010	3:07:52 PM	Helium MFC set to  0.000000
8/12/2010	3:07:52 PM	H2 MFC set to  0.000000
8/12/2010	3:07:52 PM	BCl3 MFC set to  0.000000
8/12/2010	3:07:52 PM	PHl3 MFC set to  0.000000
8/12/2010	3:07:52 PM	SiCl4 MFC set to  0.000000
8/12/2010	3:07:52 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	3:07:52 PM	Tube furnace set to 0
8/12/2010	3:08:29 PM	Helium valve closed
8/12/2010	3:08:29 PM	H2 valve closed
8/12/2010	3:08:29 PM	BCl3 valve closed
8/12/2010	3:08:29 PM	PH3 valve closed
8/12/2010	3:08:29 PM	SiCl4 pre valve closed
8/12/2010	3:08:29 PM	SiCl4 post valve closed
8/12/2010	3:08:29 PM	Bubbler valve closed
8/12/2010	3:08:29 PM	Main Vac valve opened
8/12/2010	3:08:29 PM	Bypass valve opened
8/12/2010	3:08:29 PM	Helium MFC set to  0.000000
8/12/2010	3:08:29 PM	H2 MFC set to  0.000000
8/12/2010	3:08:29 PM	BCl3 MFC set to  0.000000
8/12/2010	3:08:29 PM	PHl3 MFC set to  0.000000
8/12/2010	3:08:29 PM	SiCl4 MFC set to  0.000000
8/12/2010	3:08:29 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	3:08:29 PM	Tube furnace set to 0
8/12/2010	3:08:30 PM	Run finished at 3:08 PM
8/12/2010	3:08:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	3:08:57 PM	Helium MFC set to  60.000000
8/12/2010	3:08:58 PM	Helium valve opened
8/12/2010	3:23:10 PM	Helium valve closed
8/12/2010	3:24:39 PM	Helium valve opened
8/12/2010	3:45:56 PM	Helium valve closed
8/12/2010	3:46:41 PM	Recipe started at 3:46 PM
8/12/2010	3:46:41 PM	Helium valve closed
8/12/2010	3:46:41 PM	BCl3 valve closed
8/12/2010	3:46:41 PM	PH3 valve closed
8/12/2010	3:46:41 PM	SiCl4 pre valve closed
8/12/2010	3:46:41 PM	SiCl4 post valve closed
8/12/2010	3:46:41 PM	Main Vac valve closed
8/12/2010	3:46:41 PM	Bypass valve closed
8/12/2010	3:46:41 PM	Bubbler valve closed
8/12/2010	3:46:41 PM	H2 valve opened
8/12/2010	3:46:41 PM	Helium MFC set to  0.000000
8/12/2010	3:46:41 PM	H2 MFC set to  500.000000
8/12/2010	3:46:41 PM	BCl3 MFC set to  0.000000
8/12/2010	3:46:41 PM	PHl3 MFC set to  0.000000
8/12/2010	3:46:41 PM	SiCl4 MFC set to  0.000000
8/12/2010	3:46:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	3:46:42 PM	Tube furnace set to 0
8/12/2010	3:48:04 PM	Helium valve closed
8/12/2010	3:48:04 PM	BCl3 valve closed
8/12/2010	3:48:04 PM	PH3 valve closed
8/12/2010	3:48:04 PM	SiCl4 pre valve closed
8/12/2010	3:48:04 PM	SiCl4 post valve closed
8/12/2010	3:48:04 PM	Main Vac valve closed
8/12/2010	3:48:04 PM	Bypass valve closed
8/12/2010	3:48:04 PM	H2 valve opened
8/12/2010	3:48:04 PM	Bubbler valve opened
8/12/2010	3:48:04 PM	Helium MFC set to  0.000000
8/12/2010	3:48:04 PM	H2 MFC set to  500.000000
8/12/2010	3:48:04 PM	BCl3 MFC set to  0.000000
8/12/2010	3:48:04 PM	PHl3 MFC set to  0.000000
8/12/2010	3:48:04 PM	SiCl4 MFC set to  0.000000
8/12/2010	3:48:04 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	3:48:04 PM	Tube furnace set to 1000
8/12/2010	4:08:04 PM	Helium valve closed
8/12/2010	4:08:04 PM	BCl3 valve closed
8/12/2010	4:08:04 PM	PH3 valve closed
8/12/2010	4:08:04 PM	Main Vac valve closed
8/12/2010	4:08:04 PM	Bypass valve closed
8/12/2010	4:08:04 PM	H2 valve opened
8/12/2010	4:08:04 PM	SiCl4 pre valve opened
8/12/2010	4:08:04 PM	SiCl4 post valve opened
8/12/2010	4:08:04 PM	Bubbler valve opened
8/12/2010	4:08:04 PM	Helium MFC set to  0.000000
8/12/2010	4:08:04 PM	H2 MFC set to  500.000000
8/12/2010	4:08:04 PM	BCl3 MFC set to  0.000000
8/12/2010	4:08:04 PM	PHl3 MFC set to  0.000000
8/12/2010	4:08:04 PM	SiCl4 MFC set to  50.000000
8/12/2010	4:08:04 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	4:08:04 PM	Tube furnace set to 1000
8/12/2010	4:28:04 PM	BCl3 valve closed
8/12/2010	4:28:04 PM	PH3 valve closed
8/12/2010	4:28:04 PM	SiCl4 pre valve closed
8/12/2010	4:28:04 PM	SiCl4 post valve closed
8/12/2010	4:28:04 PM	Main Vac valve closed
8/12/2010	4:28:04 PM	Bypass valve closed
8/12/2010	4:28:04 PM	Helium valve opened
8/12/2010	4:28:04 PM	H2 valve opened
8/12/2010	4:28:04 PM	Bubbler valve opened
8/12/2010	4:28:04 PM	Helium MFC set to  250.000000
8/12/2010	4:28:04 PM	H2 MFC set to  250.000000
8/12/2010	4:28:04 PM	BCl3 MFC set to  0.000000
8/12/2010	4:28:04 PM	PHl3 MFC set to  0.000000
8/12/2010	4:28:04 PM	SiCl4 MFC set to  0.000000
8/12/2010	4:28:04 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	4:28:05 PM	Tube furnace set to 0
8/12/2010	4:56:38 PM	Run aborted at 4:56 PM
8/12/2010	4:56:38 PM	Helium valve closed
8/12/2010	4:56:38 PM	H2 valve closed
8/12/2010	4:56:38 PM	BCl3 valve closed
8/12/2010	4:56:38 PM	PH3 valve closed
8/12/2010	4:56:38 PM	SiCl4 pre valve closed
8/12/2010	4:56:38 PM	SiCl4 post valve closed
8/12/2010	4:56:38 PM	Bypass valve closed
8/12/2010	4:56:38 PM	Main Vac valve closed
8/12/2010	4:56:38 PM	Bubbler valve closed
8/12/2010	4:56:38 PM	Helium MFC set to  0.000000
8/12/2010	4:56:38 PM	H2 MFC set to  0.000000
8/12/2010	4:56:38 PM	BCl3 MFC set to  0.000000
8/12/2010	4:56:38 PM	PHl3 MFC set to  0.000000
8/12/2010	4:56:38 PM	SiCl4 MFC set to  0.000000
8/12/2010	4:56:38 PM	Tube furnace set to 0
8/12/2010	5:00:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	5:00:12 PM	Recipe started at 5:00 PM
8/12/2010	5:00:12 PM	Helium valve closed
8/12/2010	5:00:12 PM	H2 valve closed
8/12/2010	5:00:12 PM	BCl3 valve closed
8/12/2010	5:00:12 PM	PH3 valve closed
8/12/2010	5:00:12 PM	SiCl4 pre valve closed
8/12/2010	5:00:12 PM	SiCl4 post valve closed
8/12/2010	5:00:12 PM	Main Vac valve closed
8/12/2010	5:00:12 PM	Bubbler valve closed
8/12/2010	5:00:12 PM	Bypass valve opened
8/12/2010	5:00:12 PM	Helium MFC set to  0.000000
8/12/2010	5:00:12 PM	H2 MFC set to  0.000000
8/12/2010	5:00:12 PM	BCl3 MFC set to  0.000000
8/12/2010	5:00:12 PM	PHl3 MFC set to  0.000000
8/12/2010	5:00:12 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:00:12 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:00:12 PM	Tube furnace set to 0
8/12/2010	5:02:14 PM	Helium valve closed
8/12/2010	5:02:14 PM	H2 valve closed
8/12/2010	5:02:14 PM	BCl3 valve closed
8/12/2010	5:02:14 PM	PH3 valve closed
8/12/2010	5:02:14 PM	SiCl4 pre valve closed
8/12/2010	5:02:14 PM	SiCl4 post valve closed
8/12/2010	5:02:14 PM	Bubbler valve closed
8/12/2010	5:02:14 PM	Main Vac valve opened
8/12/2010	5:02:14 PM	Bypass valve opened
8/12/2010	5:02:14 PM	Helium MFC set to  0.000000
8/12/2010	5:02:14 PM	H2 MFC set to  0.000000
8/12/2010	5:02:14 PM	BCl3 MFC set to  0.000000
8/12/2010	5:02:14 PM	PHl3 MFC set to  0.000000
8/12/2010	5:02:14 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:02:14 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:02:14 PM	Tube furnace set to 0
8/12/2010	5:02:15 PM	Run finished at 5:02 PM
8/12/2010	5:02:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	5:02:28 PM	Helium MFC set to  50.000000
8/12/2010	5:02:28 PM	Helium valve opened
8/12/2010	5:37:00 PM	Helium valve closed
8/12/2010	5:38:07 PM	Recipe started at 5:38 PM
8/12/2010	5:38:07 PM	Helium valve closed
8/12/2010	5:38:07 PM	BCl3 valve closed
8/12/2010	5:38:08 PM	PH3 valve closed
8/12/2010	5:38:08 PM	SiCl4 pre valve closed
8/12/2010	5:38:08 PM	SiCl4 post valve closed
8/12/2010	5:38:08 PM	Main Vac valve closed
8/12/2010	5:38:08 PM	Bypass valve closed
8/12/2010	5:38:08 PM	Bubbler valve closed
8/12/2010	5:38:08 PM	H2 valve opened
8/12/2010	5:38:08 PM	Helium MFC set to  0.000000
8/12/2010	5:38:08 PM	H2 MFC set to  500.000000
8/12/2010	5:38:08 PM	BCl3 MFC set to  0.000000
8/12/2010	5:38:08 PM	PHl3 MFC set to  0.000000
8/12/2010	5:38:08 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:38:08 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:38:08 PM	Tube furnace set to 0
8/12/2010	5:41:20 PM	Run aborted at 5:41 PM
8/12/2010	5:41:20 PM	Helium valve closed
8/12/2010	5:41:20 PM	H2 valve closed
8/12/2010	5:41:20 PM	BCl3 valve closed
8/12/2010	5:41:20 PM	PH3 valve closed
8/12/2010	5:41:20 PM	SiCl4 pre valve closed
8/12/2010	5:41:20 PM	SiCl4 post valve closed
8/12/2010	5:41:20 PM	Bypass valve closed
8/12/2010	5:41:20 PM	Main Vac valve closed
8/12/2010	5:41:20 PM	Bubbler valve closed
8/12/2010	5:41:20 PM	Helium MFC set to  0.000000
8/12/2010	5:41:20 PM	H2 MFC set to  0.000000
8/12/2010	5:41:20 PM	BCl3 MFC set to  0.000000
8/12/2010	5:41:20 PM	PHl3 MFC set to  0.000000
8/12/2010	5:41:20 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:41:20 PM	Tube furnace set to 0
8/12/2010	5:41:48 PM	Recipe started at 5:41 PM
8/12/2010	5:41:48 PM	Helium valve closed
8/12/2010	5:41:48 PM	BCl3 valve closed
8/12/2010	5:41:48 PM	PH3 valve closed
8/12/2010	5:41:48 PM	SiCl4 pre valve closed
8/12/2010	5:41:48 PM	SiCl4 post valve closed
8/12/2010	5:41:48 PM	Main Vac valve closed
8/12/2010	5:41:48 PM	Bypass valve closed
8/12/2010	5:41:48 PM	Bubbler valve closed
8/12/2010	5:41:48 PM	H2 valve opened
8/12/2010	5:41:48 PM	Helium MFC set to  0.000000
8/12/2010	5:41:48 PM	H2 MFC set to  500.000000
8/12/2010	5:41:48 PM	BCl3 MFC set to  0.000000
8/12/2010	5:41:48 PM	PHl3 MFC set to  0.000000
8/12/2010	5:41:48 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:41:48 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:41:48 PM	Tube furnace set to 0
8/12/2010	5:42:31 PM	Run aborted at 5:42 PM
8/12/2010	5:42:31 PM	Helium valve closed
8/12/2010	5:42:31 PM	H2 valve closed
8/12/2010	5:42:31 PM	BCl3 valve closed
8/12/2010	5:42:31 PM	PH3 valve closed
8/12/2010	5:42:31 PM	SiCl4 pre valve closed
8/12/2010	5:42:31 PM	SiCl4 post valve closed
8/12/2010	5:42:31 PM	Bypass valve closed
8/12/2010	5:42:31 PM	Main Vac valve closed
8/12/2010	5:42:31 PM	Bubbler valve closed
8/12/2010	5:42:31 PM	Helium MFC set to  0.000000
8/12/2010	5:42:31 PM	H2 MFC set to  0.000000
8/12/2010	5:42:31 PM	BCl3 MFC set to  0.000000
8/12/2010	5:42:31 PM	PHl3 MFC set to  0.000000
8/12/2010	5:42:31 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:42:31 PM	Tube furnace set to 0
8/12/2010	5:42:39 PM	Helium MFC set to  50.000000
8/12/2010	5:42:39 PM	Helium valve opened
8/12/2010	5:42:53 PM	Helium valve closed
8/12/2010	5:42:57 PM	H2 MFC set to  50.000000
8/12/2010	5:42:59 PM	H2 valve opened
8/12/2010	5:43:04 PM	H2 valve closed
8/12/2010	5:43:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	5:43:08 PM	Recipe started at 5:43 PM
8/12/2010	5:43:08 PM	Helium valve closed
8/12/2010	5:43:08 PM	H2 valve closed
8/12/2010	5:43:08 PM	BCl3 valve closed
8/12/2010	5:43:08 PM	PH3 valve closed
8/12/2010	5:43:08 PM	SiCl4 pre valve closed
8/12/2010	5:43:08 PM	SiCl4 post valve closed
8/12/2010	5:43:08 PM	Main Vac valve closed
8/12/2010	5:43:08 PM	Bubbler valve closed
8/12/2010	5:43:08 PM	Bypass valve opened
8/12/2010	5:43:08 PM	Helium MFC set to  0.000000
8/12/2010	5:43:08 PM	H2 MFC set to  0.000000
8/12/2010	5:43:08 PM	BCl3 MFC set to  0.000000
8/12/2010	5:43:08 PM	PHl3 MFC set to  0.000000
8/12/2010	5:43:08 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:43:08 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:43:08 PM	Tube furnace set to 0
8/12/2010	5:43:08 PM	Helium valve closed
8/12/2010	5:43:08 PM	H2 valve closed
8/12/2010	5:43:08 PM	BCl3 valve closed
8/12/2010	5:43:08 PM	PH3 valve closed
8/12/2010	5:43:08 PM	SiCl4 pre valve closed
8/12/2010	5:43:08 PM	SiCl4 post valve closed
8/12/2010	5:43:08 PM	Bubbler valve closed
8/12/2010	5:43:08 PM	Main Vac valve opened
8/12/2010	5:43:08 PM	Bypass valve opened
8/12/2010	5:43:08 PM	Helium MFC set to  0.000000
8/12/2010	5:43:08 PM	H2 MFC set to  0.000000
8/12/2010	5:43:08 PM	BCl3 MFC set to  0.000000
8/12/2010	5:43:08 PM	PHl3 MFC set to  0.000000
8/12/2010	5:43:08 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:43:08 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:43:09 PM	Tube furnace set to 0
8/12/2010	5:43:09 PM	Run finished at 5:43 PM
8/12/2010	5:43:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	5:54:39 PM	Helium MFC set to  50.000000
8/12/2010	5:54:39 PM	Helium valve opened
8/12/2010	5:54:45 PM	Helium valve closed
8/12/2010	5:54:51 PM	H2 MFC set to  50.000000
8/12/2010	5:54:52 PM	H2 valve opened
8/12/2010	5:55:03 PM	H2 valve closed
8/12/2010	5:55:47 PM	Helium valve opened
8/12/2010	5:56:30 PM	Helium valve closed
8/12/2010	5:57:30 PM	Recipe started at 5:57 PM
8/12/2010	5:57:30 PM	Helium valve closed
8/12/2010	5:57:30 PM	BCl3 valve closed
8/12/2010	5:57:30 PM	PH3 valve closed
8/12/2010	5:57:30 PM	SiCl4 pre valve closed
8/12/2010	5:57:30 PM	SiCl4 post valve closed
8/12/2010	5:57:30 PM	Main Vac valve closed
8/12/2010	5:57:30 PM	Bypass valve closed
8/12/2010	5:57:30 PM	Bubbler valve closed
8/12/2010	5:57:30 PM	H2 valve opened
8/12/2010	5:57:30 PM	Helium MFC set to  0.000000
8/12/2010	5:57:30 PM	H2 MFC set to  500.000000
8/12/2010	5:57:30 PM	BCl3 MFC set to  0.000000
8/12/2010	5:57:30 PM	PHl3 MFC set to  0.000000
8/12/2010	5:57:30 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:57:30 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:57:31 PM	Tube furnace set to 0
8/12/2010	5:58:52 PM	Helium valve closed
8/12/2010	5:58:52 PM	BCl3 valve closed
8/12/2010	5:58:52 PM	PH3 valve closed
8/12/2010	5:58:52 PM	SiCl4 pre valve closed
8/12/2010	5:58:52 PM	SiCl4 post valve closed
8/12/2010	5:58:52 PM	Main Vac valve closed
8/12/2010	5:58:52 PM	Bypass valve closed
8/12/2010	5:58:52 PM	H2 valve opened
8/12/2010	5:58:52 PM	Bubbler valve opened
8/12/2010	5:58:52 PM	Helium MFC set to  0.000000
8/12/2010	5:58:52 PM	H2 MFC set to  500.000000
8/12/2010	5:58:52 PM	BCl3 MFC set to  0.000000
8/12/2010	5:58:52 PM	PHl3 MFC set to  0.000000
8/12/2010	5:58:52 PM	SiCl4 MFC set to  0.000000
8/12/2010	5:58:52 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	5:58:52 PM	Tube furnace set to 1000
8/12/2010	6:18:52 PM	Helium valve closed
8/12/2010	6:18:52 PM	BCl3 valve closed
8/12/2010	6:18:52 PM	PH3 valve closed
8/12/2010	6:18:52 PM	Main Vac valve closed
8/12/2010	6:18:52 PM	Bypass valve closed
8/12/2010	6:18:52 PM	H2 valve opened
8/12/2010	6:18:52 PM	SiCl4 pre valve opened
8/12/2010	6:18:52 PM	SiCl4 post valve opened
8/12/2010	6:18:52 PM	Bubbler valve opened
8/12/2010	6:18:52 PM	Helium MFC set to  0.000000
8/12/2010	6:18:52 PM	H2 MFC set to  500.000000
8/12/2010	6:18:52 PM	BCl3 MFC set to  0.000000
8/12/2010	6:18:52 PM	PHl3 MFC set to  0.000000
8/12/2010	6:18:52 PM	SiCl4 MFC set to  50.000000
8/12/2010	6:18:52 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	6:18:52 PM	Tube furnace set to 1000
8/12/2010	6:33:52 PM	BCl3 valve closed
8/12/2010	6:33:52 PM	PH3 valve closed
8/12/2010	6:33:52 PM	SiCl4 pre valve closed
8/12/2010	6:33:52 PM	SiCl4 post valve closed
8/12/2010	6:33:52 PM	Main Vac valve closed
8/12/2010	6:33:52 PM	Bypass valve closed
8/12/2010	6:33:52 PM	Helium valve opened
8/12/2010	6:33:52 PM	H2 valve opened
8/12/2010	6:33:52 PM	Bubbler valve opened
8/12/2010	6:33:52 PM	Helium MFC set to  250.000000
8/12/2010	6:33:52 PM	H2 MFC set to  250.000000
8/12/2010	6:33:52 PM	BCl3 MFC set to  0.000000
8/12/2010	6:33:52 PM	PHl3 MFC set to  0.000000
8/12/2010	6:33:52 PM	SiCl4 MFC set to  0.000000
8/12/2010	6:33:52 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	6:33:53 PM	Tube furnace set to 0
8/12/2010	7:00:19 PM	Run aborted at 7:00 PM
8/12/2010	7:00:19 PM	Helium valve closed
8/12/2010	7:00:19 PM	H2 valve closed
8/12/2010	7:00:19 PM	BCl3 valve closed
8/12/2010	7:00:19 PM	PH3 valve closed
8/12/2010	7:00:19 PM	SiCl4 pre valve closed
8/12/2010	7:00:19 PM	SiCl4 post valve closed
8/12/2010	7:00:19 PM	Bypass valve closed
8/12/2010	7:00:19 PM	Main Vac valve closed
8/12/2010	7:00:19 PM	Bubbler valve closed
8/12/2010	7:00:19 PM	Helium MFC set to  0.000000
8/12/2010	7:00:19 PM	H2 MFC set to  0.000000
8/12/2010	7:00:19 PM	BCl3 MFC set to  0.000000
8/12/2010	7:00:19 PM	PHl3 MFC set to  0.000000
8/12/2010	7:00:19 PM	SiCl4 MFC set to  0.000000
8/12/2010	7:00:19 PM	Tube furnace set to 0
8/12/2010	7:04:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	7:04:15 PM	Recipe started at 7:04 PM
8/12/2010	7:04:15 PM	Helium valve closed
8/12/2010	7:04:15 PM	H2 valve closed
8/12/2010	7:04:15 PM	BCl3 valve closed
8/12/2010	7:04:15 PM	PH3 valve closed
8/12/2010	7:04:15 PM	SiCl4 pre valve closed
8/12/2010	7:04:15 PM	SiCl4 post valve closed
8/12/2010	7:04:15 PM	Main Vac valve closed
8/12/2010	7:04:15 PM	Bubbler valve closed
8/12/2010	7:04:15 PM	Bypass valve opened
8/12/2010	7:04:15 PM	Helium MFC set to  0.000000
8/12/2010	7:04:15 PM	H2 MFC set to  0.000000
8/12/2010	7:04:15 PM	BCl3 MFC set to  0.000000
8/12/2010	7:04:15 PM	PHl3 MFC set to  0.000000
8/12/2010	7:04:15 PM	SiCl4 MFC set to  0.000000
8/12/2010	7:04:15 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	7:04:15 PM	Tube furnace set to 0
8/12/2010	7:04:52 PM	Helium valve closed
8/12/2010	7:04:52 PM	H2 valve closed
8/12/2010	7:04:52 PM	BCl3 valve closed
8/12/2010	7:04:52 PM	PH3 valve closed
8/12/2010	7:04:52 PM	SiCl4 pre valve closed
8/12/2010	7:04:52 PM	SiCl4 post valve closed
8/12/2010	7:04:52 PM	Bubbler valve closed
8/12/2010	7:04:52 PM	Main Vac valve opened
8/12/2010	7:04:52 PM	Bypass valve opened
8/12/2010	7:04:52 PM	Helium MFC set to  0.000000
8/12/2010	7:04:52 PM	H2 MFC set to  0.000000
8/12/2010	7:04:52 PM	BCl3 MFC set to  0.000000
8/12/2010	7:04:52 PM	PHl3 MFC set to  0.000000
8/12/2010	7:04:52 PM	SiCl4 MFC set to  0.000000
8/12/2010	7:04:52 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	7:04:52 PM	Tube furnace set to 0
8/12/2010	7:04:52 PM	Run finished at 7:04 PM
8/12/2010	7:04:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	7:05:03 PM	Helium MFC set to  50.000000
8/12/2010	7:05:04 PM	Helium valve opened
8/12/2010	7:08:34 PM	Helium valve closed
8/12/2010	9:36:11 PM	Helium valve opened
8/12/2010	9:42:42 PM	Helium valve closed
8/12/2010	9:43:53 PM	Recipe started at 9:43 PM
8/12/2010	9:43:53 PM	Helium valve closed
8/12/2010	9:43:53 PM	BCl3 valve closed
8/12/2010	9:43:53 PM	PH3 valve closed
8/12/2010	9:43:53 PM	SiCl4 pre valve closed
8/12/2010	9:43:53 PM	SiCl4 post valve closed
8/12/2010	9:43:53 PM	Main Vac valve closed
8/12/2010	9:43:53 PM	Bypass valve closed
8/12/2010	9:43:53 PM	Bubbler valve closed
8/12/2010	9:43:53 PM	H2 valve opened
8/12/2010	9:43:53 PM	Helium MFC set to  0.000000
8/12/2010	9:43:53 PM	H2 MFC set to  500.000000
8/12/2010	9:43:53 PM	BCl3 MFC set to  0.000000
8/12/2010	9:43:53 PM	PHl3 MFC set to  0.000000
8/12/2010	9:43:53 PM	SiCl4 MFC set to  0.000000
8/12/2010	9:43:53 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	9:43:53 PM	Tube furnace set to 0
8/12/2010	9:45:16 PM	Helium valve closed
8/12/2010	9:45:16 PM	BCl3 valve closed
8/12/2010	9:45:16 PM	PH3 valve closed
8/12/2010	9:45:16 PM	SiCl4 pre valve closed
8/12/2010	9:45:16 PM	SiCl4 post valve closed
8/12/2010	9:45:16 PM	Main Vac valve closed
8/12/2010	9:45:16 PM	Bypass valve closed
8/12/2010	9:45:16 PM	H2 valve opened
8/12/2010	9:45:16 PM	Bubbler valve opened
8/12/2010	9:45:16 PM	Helium MFC set to  0.000000
8/12/2010	9:45:16 PM	H2 MFC set to  500.000000
8/12/2010	9:45:16 PM	BCl3 MFC set to  0.000000
8/12/2010	9:45:16 PM	PHl3 MFC set to  0.000000
8/12/2010	9:45:16 PM	SiCl4 MFC set to  0.000000
8/12/2010	9:45:16 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	9:45:17 PM	Tube furnace set to 1000
8/12/2010	10:05:17 PM	Helium valve closed
8/12/2010	10:05:17 PM	BCl3 valve closed
8/12/2010	10:05:17 PM	PH3 valve closed
8/12/2010	10:05:17 PM	Main Vac valve closed
8/12/2010	10:05:17 PM	Bypass valve closed
8/12/2010	10:05:17 PM	H2 valve opened
8/12/2010	10:05:17 PM	SiCl4 pre valve opened
8/12/2010	10:05:17 PM	SiCl4 post valve opened
8/12/2010	10:05:17 PM	Bubbler valve opened
8/12/2010	10:05:17 PM	Helium MFC set to  0.000000
8/12/2010	10:05:17 PM	H2 MFC set to  500.000000
8/12/2010	10:05:17 PM	BCl3 MFC set to  0.000000
8/12/2010	10:05:17 PM	PHl3 MFC set to  0.000000
8/12/2010	10:05:17 PM	SiCl4 MFC set to  50.000000
8/12/2010	10:05:17 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:05:17 PM	Tube furnace set to 1000
8/12/2010	10:21:17 PM	BCl3 valve closed
8/12/2010	10:21:17 PM	PH3 valve closed
8/12/2010	10:21:17 PM	SiCl4 pre valve closed
8/12/2010	10:21:17 PM	SiCl4 post valve closed
8/12/2010	10:21:17 PM	Main Vac valve closed
8/12/2010	10:21:17 PM	Bypass valve closed
8/12/2010	10:21:17 PM	Helium valve opened
8/12/2010	10:21:17 PM	H2 valve opened
8/12/2010	10:21:17 PM	Bubbler valve opened
8/12/2010	10:21:17 PM	Helium MFC set to  250.000000
8/12/2010	10:21:17 PM	H2 MFC set to  250.000000
8/12/2010	10:21:17 PM	BCl3 MFC set to  0.000000
8/12/2010	10:21:17 PM	PHl3 MFC set to  0.000000
8/12/2010	10:21:17 PM	SiCl4 MFC set to  0.000000
8/12/2010	10:21:17 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:21:17 PM	Tube furnace set to 0
8/12/2010	10:51:23 PM	Run aborted at 10:51 PM
8/12/2010	10:51:23 PM	Helium valve closed
8/12/2010	10:51:23 PM	H2 valve closed
8/12/2010	10:51:23 PM	BCl3 valve closed
8/12/2010	10:51:23 PM	PH3 valve closed
8/12/2010	10:51:23 PM	SiCl4 pre valve closed
8/12/2010	10:51:23 PM	SiCl4 post valve closed
8/12/2010	10:51:23 PM	Bypass valve closed
8/12/2010	10:51:23 PM	Main Vac valve closed
8/12/2010	10:51:23 PM	Bubbler valve closed
8/12/2010	10:51:23 PM	Helium MFC set to  0.000000
8/12/2010	10:51:23 PM	H2 MFC set to  0.000000
8/12/2010	10:51:23 PM	BCl3 MFC set to  0.000000
8/12/2010	10:51:23 PM	PHl3 MFC set to  0.000000
8/12/2010	10:51:23 PM	SiCl4 MFC set to  0.000000
8/12/2010	10:51:23 PM	Tube furnace set to 0
8/12/2010	10:55:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2010	10:55:58 PM	Recipe started at 10:55 PM
8/12/2010	10:55:58 PM	Helium valve closed
8/12/2010	10:55:58 PM	H2 valve closed
8/12/2010	10:55:58 PM	BCl3 valve closed
8/12/2010	10:55:58 PM	PH3 valve closed
8/12/2010	10:55:58 PM	SiCl4 pre valve closed
8/12/2010	10:55:58 PM	SiCl4 post valve closed
8/12/2010	10:55:58 PM	Main Vac valve closed
8/12/2010	10:55:58 PM	Bubbler valve closed
8/12/2010	10:55:58 PM	Bypass valve opened
8/12/2010	10:55:58 PM	Helium MFC set to  0.000000
8/12/2010	10:55:58 PM	H2 MFC set to  0.000000
8/12/2010	10:55:58 PM	BCl3 MFC set to  0.000000
8/12/2010	10:55:58 PM	PHl3 MFC set to  0.000000
8/12/2010	10:55:58 PM	SiCl4 MFC set to  0.000000
8/12/2010	10:55:58 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:55:58 PM	Tube furnace set to 0
8/12/2010	10:56:34 PM	Helium valve closed
8/12/2010	10:56:34 PM	H2 valve closed
8/12/2010	10:56:34 PM	BCl3 valve closed
8/12/2010	10:56:34 PM	PH3 valve closed
8/12/2010	10:56:34 PM	SiCl4 pre valve closed
8/12/2010	10:56:34 PM	SiCl4 post valve closed
8/12/2010	10:56:34 PM	Bubbler valve closed
8/12/2010	10:56:34 PM	Main Vac valve opened
8/12/2010	10:56:34 PM	Bypass valve opened
8/12/2010	10:56:34 PM	Helium MFC set to  0.000000
8/12/2010	10:56:34 PM	H2 MFC set to  0.000000
8/12/2010	10:56:34 PM	BCl3 MFC set to  0.000000
8/12/2010	10:56:34 PM	PHl3 MFC set to  0.000000
8/12/2010	10:56:34 PM	SiCl4 MFC set to  0.000000
8/12/2010	10:56:34 PM	Bypass solenoid MFC set to  0.000000
8/12/2010	10:56:35 PM	Tube furnace set to 0
8/12/2010	10:56:35 PM	Run finished at 10:56 PM
8/12/2010	10:56:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
